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US Patent 10431428 System for providing variable capacitance

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Is a
Patent
Patent
0

Patent attributes

Patent Jurisdiction
United States Patent and Trademark Office
United States Patent and Trademark Office
0
Patent Number
104314280
Patent Inventor Names
Imran Ahmed Bhutta0
Michael Gilliam Ulrich0
Date of Patent
October 1, 2019
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Patent Application Number
156372710
Date Filed
June 29, 2017
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Patent Citations Received
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US Patent 12009181 Match efficiency-variation compensation
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US Patent 11791134 Impedance adjustment device
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US Patent 11804362 Frequency tuning for modulated plasma systems
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US Patent 11387078 Impedance matching device and impedance matching method
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US Patent 11424105 Plasma processing apparatus
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US Patent 11978612 Plasma processing apparatus
0
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US Patent 11545954 Impedance adjustment device
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US Patent 11552612 Impedance adjustment device and impedance adjustment method
...
Patent Primary Examiner
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Stephen E. Jones
0
Patent abstract

In one embodiment, a radio frequency (RF) impedance matching network includes electronically variable capacitors (EVCs), each EVC including discrete capacitors operably coupled in parallel. The discrete capacitors include fine capacitors each having a capacitance value substantially similar to a fine capacitance value, and coarse capacitors each having a capacitance value substantially similar to a coarse capacitance value. The increase of the variable total capacitance of each EVC is achieved by switching in more of the coarse capacitors or more of the fine capacitors than are already switched in without switching out a coarse capacitor that is already switched in.

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