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US Patent 10431428 System for providing variable capacitance

OverviewStructured DataIssuesContributorsActivity
Is a
Patent
Patent
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Date Filed
June 29, 2017
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Date of Patent
October 1, 2019
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Patent Application Number
15637271
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Patent Citations Received
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US Patent 12009181 Match efficiency-variation compensation
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US Patent 11791134 Impedance adjustment device
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US Patent 11804362 Frequency tuning for modulated plasma systems
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US Patent 11387078 Impedance matching device and impedance matching method
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US Patent 11424105 Plasma processing apparatus
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US Patent 11978612 Plasma processing apparatus
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US Patent 11545954 Impedance adjustment device
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US Patent 11552612 Impedance adjustment device and impedance adjustment method
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US Patent 10734196 Impedance matching device
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US Patent 10778209 Pin diode driving circuit and threshold value determination method
•••
Patent Inventor Names
Imran Ahmed Bhutta
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Michael Gilliam Ulrich
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Patent Jurisdiction
United States Patent and Trademark Office
United States Patent and Trademark Office
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Patent Number
10431428
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Patent Primary Examiner
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Stephen E. Jones
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