US Patent 11373893 Cryogenic electrostatic chuck
Is a
Current Assignee
Date Filed
August 19, 2020
Date of Patent
June 28, 2022
Patent Applicant
Patent Application Number
16997300
Patent Citations
Patent Jurisdiction
Patent Number
Patent Primary Examiner
Find more entities like US Patent 11373893 Cryogenic electrostatic chuck
Use the Golden Query Tool to find similar entities by any field in the Knowledge Graph, including industry, location, and more.
By using this site, you agree to our Terms of Service.