US Patent 11293551 Break-seal system with breakable-membrane bridging rings

A monolithic break-seal includes a membrane that separates an outer ring from an inner ring. The inner ring is bonded to a vacuum cell and the outer ring is bonded to a vacuum interface. To protect against unintentional breakage of the membrane, a surface of the outer ring not bonded to the vacuum interface contacts the vacuum cell. An external vacuum system evacuates the vacuum cell through an aperture of the break-seal. Once a target vacuum level is reached for the vacuum cell, a cap is bonded to the inner ring, blocking the aperture and hermetically sealing the vacuum cell. The membrane is broken so that the hermetically sealed vacuum cell can be separated from the vacuum interface to which the outer ring remains bonded.