US Patent 11145516 Substrate processing method and substrate processing apparatus
Patent 11145516 was granted and assigned to Screen Holdings on October, 2021 by the United States Patent and Trademark Office.
Is a
Current Assignee
Date Filed
November 19, 2019
Date of Patent
October 12, 2021
Patent Applicant
Patent Application Number
20191119
Patent Inventor Names
Yuya Akanishi
1
Ayumi Higuchi
1
Patent Jurisdiction
Patent Number
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