US Patent 11043239 Magneto-optic Kerr effect metrology systems
Patent 11043239 was granted and assigned to KLA on June, 2021 by the United States Patent and Trademark Office.
Is a
Date Filed
March 17, 2020
Date of Patent
June 22, 2021
Patent Application Number
16821192
Patent Inventor Names
Yaolei Zheng
0
Shankar Krishnan
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Walter H. Johnson
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Yang Zhou
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Changfei Yan
0
Chunxia Li
0
David Y. Wang
0
Hai-Yang You
0
Haijing Peng
0
Jianou Shi
0
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Patent Jurisdiction
Patent Number
Patent Primary Examiner
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