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US Patent 11038043 Semiconductor device and manufacturing method thereof
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Is a
Patent
Date Filed
April 26, 2019
Date of Patent
June 15, 2021
Patent Application Number
16396405
Patent Citations
US Patent 10263100 Buffer regions for blocking unwanted diffusion in nanosheet transistors
US Patent 10211307 Methods of manufacturing inner spacers in a gate-all-around (GAA) FET through multi-layer spacer replacement
US Patent 10714592 Method of manufacturing a semiconductor device and a semiconductor device
US Patent 10355102 Semiconductor device and method of manufacturing the same
US Patent 10164012 Semiconductor device and manufacturing method thereof
0
Patent Citations Received
US Patent 12094927 Source/drain isolation structures for leakage prevention
0
US Patent 11251313 Semiconductor device and method of fabricating the same
US Patent 11929422 Passivation layers for semiconductor devices
0
US Patent 11532702 Source/drain isolation structures for leakage prevention
Patent Inventor Names
I-Sheng Chen
0
Chao-Ching Cheng
0
Hung-Li Chiang
0
Tzu-Chiang Chen
0
Patent Jurisdiction
United States Patent and Trademark Office
Patent Number
11038043
Patent Primary Examiner
Hsien-Ming Lee
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