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US Patent 11013075 RF apparatus with arc prevention using non-linear devices
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Is a
Patent
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Date Filed
December 20, 2018
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Date of Patent
May 18, 2021
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Patent Application Number
16228482
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Patent Citations
US Patent 10677822 Electrical overstress detection device
Patent Citations Received
US Patent 11961710 Plasma processing apparatus
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US Patent 11462391 Plasma processing apparatus, plasma processing method, and memory medium
US Patent 11569070 Plasma processing apparatus
US Patent 11335541 Plasma processing apparatus, plasma processing method, and memory medium
US Patent 11335544 Plasma processing apparatus
US Patent 11784030 Plasma processing apparatus
US Patent 11782151 Electronic devices with non-static object detection
US Patent 11462392 Plasma processing apparatus
0
US Patent 11600469 Plasma processing apparatus
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US Patent 11600466 Plasma processing apparatus, plasma processing method, and memory medium
0
•••
Patent Inventor Names
David Paul Lester
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Lionel Mongin
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Patent Jurisdiction
United States Patent and Trademark Office
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Patent Number
11013075
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Patent Primary Examiner
Hung D Nguyen
0
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