US Patent 10989879 Thermally compensated fiber interferometer assembly
Patent 10989879 was granted and assigned to Nikon Metrology on April, 2021 by the United States Patent and Trademark Office.
Is a
Current Assignee
Date Filed
June 2, 2015
0
Date of Patent
April 27, 2021
0
Patent Applicant
Patent Application Number
15316143
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Patent Inventor Names
Pavel Slyusarev
0
Anthony R. Slotwinski
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Mina A. Rezk
0
Patent Jurisdiction
Patent Number
Patent Primary Examiner
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