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US Patent 10989879 Thermally compensated fiber interferometer assembly

Patent 10989879 was granted and assigned to Nikon Metrology on April, 2021 by the United States Patent and Trademark Office.

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Patent
Patent
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Patent attributes

Patent Applicant
Nikon Metrology
Nikon Metrology
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Current Assignee
Nikon Metrology
Nikon Metrology
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Patent Jurisdiction
United States Patent and Trademark Office
United States Patent and Trademark Office
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Patent Number
109898790
Patent Inventor Names
Pavel Slyusarev0
Anthony R. Slotwinski0
Mina A. Rezk0
Date of Patent
April 27, 2021
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Patent Application Number
153161430
Date Filed
June 2, 2015
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Patent Primary Examiner
‌
Yuqing Xiao
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Patent abstract

An optical delay between a first fiber and a second fiber is temperature compensated by combining fibers with different thermal path length changes. In some examples, fibers with different buffer coatings exhibit different path length changes per unit length and temperature. Combining such fibers in a fiber array provides a path length difference that is substantially independent of temperature.

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