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US Patent 10985735 Impedance matching device and impedance matching method

OverviewStructured DataIssuesContributorsActivity
Is a
Patent
Patent
0
Date Filed
December 20, 2019
0
Date of Patent
April 20, 2021
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Patent Application Number
16722742
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Patent Citations
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US Patent 10340879 Switching circuit
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US Patent 10431424 Parasitic capacitance compensation circuit
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US Patent 10431428 System for providing variable capacitance
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US Patent 10454453 RF impedance matching network
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US Patent 10460912 RF impedance matching circuit and systems and methods incorporating same
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US Patent 10455729 Enclosure cooling system
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US Patent 10483090 Restricted capacitor switching
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US Patent 10026594 RF impedance matching network
0
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US Patent 10217608 Switching circuit for RF currents
Patent Citations Received
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US Patent 11978612 Plasma processing apparatus
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Patent Inventor Names
Tatsuya Morii
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Patent Jurisdiction
United States Patent and Trademark Office
United States Patent and Trademark Office
0
Patent Number
10985735
0
Patent Primary Examiner
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Kurtis R Bahr
0

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