US Patent 10896831 Film forming apparatus
Is a
Date Filed
August 31, 2018
0
Date of Patent
January 19, 2021
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Patent Application Number
16118734
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Patent Citations Received
Patent Inventor Names
Takahiro Kozawa
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Masahiko Ito
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Masami Naito
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Naohisa Ikeya
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Hidekazu Tsuchida
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Hideyuki Uehigashi
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Hiroaki Fujibayashi
0
Hirofumi Aoki
0
Isaho Kamata
0
Kazukuni Hara
0
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Patent Jurisdiction
Patent Number
Patent Primary Examiner
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