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US Patent 10896831 Film forming apparatus

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Patent abstractTimelineTable: Further ResourcesReferences
Is a
Patent
Patent
1

Patent attributes

Patent Jurisdiction
United States Patent and Trademark Office
United States Patent and Trademark Office
1
Patent Number
108968311
Patent Inventor Names
Takahiro Kozawa1
Masahiko Ito1
Masami Naito1
Naohisa Ikeya1
Hidekazu Tsuchida1
Hideyuki Uehigashi1
Hiroaki Fujibayashi1
Hirofumi Aoki1
...
Date of Patent
January 19, 2021
1
Patent Application Number
161187341
Date Filed
August 31, 2018
1
Patent Citations Received
‌
US Patent 11598004 Lid assembly apparatus and methods for substrate processing chambers
Patent Primary Examiner
‌
Rudy Zervigon
1
Patent abstract

A supply part includes a first partition, a second partition under the first partition, a third partition under the second partition, a first flow path between the first partition and the second partition allowing a first gas to be introduced therein, a second flow path between the second partition and the third partition allowing a second gas to be introduced therein, a first piping extending from the second partition to reach below the third partition and being communicated with the first flow path, a second piping extending from the third partition to reach below the third partition and being communicated with the second flow path, and a convex portion provided on an outer circumferential surface of the first piping or an inner circumferential surface of the second piping protruding from one of the outer circumferential surface and the inner circumferential surface toward the other one.

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