Is a
Patent attributes
Patent Applicant
Current Assignee
Patent Jurisdiction
Patent Number
Patent Inventor Names
Uday Mitra0
Regina Freed0
Sanjay Natarajan0
Date of Patent
January 12, 2021
Patent Application Number
16411437
Date Filed
May 14, 2019
Patent Citations
Patent Primary Examiner
Patent abstract
Apparatuses and methods to provide a fully self-aligned via are described. Some embodiments of the disclosure provide an electronic device having a bridging via between a first metallization and a third metallization layer, the bridging via not contacting a second metallization layers. Methods of providing self-aligned bridging vias are also described.
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