Create
Log in
Sign up
Golden has been acquired by ComplyAdvantage.
Read about it here ⟶
US Patent 10770336 Substrate lift mechanism and reactor including same
Overview
Structured Data
Issues
Contributors
Activity
Access by API
Access by API
Is a
Patent
Date Filed
August 8, 2017
Date of Patent
September 8, 2020
Patent Application Number
15672096
Patent Citations
US Patent 10361201 Semiconductor structure and device formed using selective epitaxial process
US Patent 10343920 Aligned carbon nanotubes
US Patent 10347547 Suppressing interfacial reactions by varying the wafer temperature throughout deposition
US Patent 10388513 Method for depositing silicon-free carbon-containing film as gap-fill layer by pulse plasma-assisted deposition
US Patent 10395917 Si precursors for deposition of SiN at low temperatures
US Patent 10395919 Method and apparatus for filling a gap
US Patent 10428419 Combination CVD/ALD method, source and pulse profile modification
US Patent 10435790 Method of subatmospheric plasma-enhanced ALD using capacitively coupled electrodes with narrow gap
US Patent 10468244 Precursors and flowable CVD methods for making low-K films to fill surface features
US Patent 10483154 Front-end-of-line device structure and method of forming such a front-end-of-line device structure
•••
Patent Citations Received
US Patent 11296189 Method for depositing a phosphorus doped silicon arsenide film and related semiconductor device structures
US Patent 11450529 Methods for selectively forming a target film on a substrate comprising a first dielectric surface and a second metallic surface
US Patent 11286558 Methods for depositing a molybdenum nitride film on a surface of a substrate by a cyclical deposition process and related semiconductor device structures including a molybdenum nitride film
US Patent D947913 Susceptor shaft
US Patent 11295980 Methods for depositing a molybdenum metal film over a dielectric surface of a substrate by a cyclical deposition process and related semiconductor device structures
US Patent 11274369 Thin film deposition method
Patent Jurisdiction
United States Patent and Trademark Office
Patent Number
10770336
Patent Primary Examiner
Charlee J. C. Bennett
Find more entities like US Patent 10770336 Substrate lift mechanism and reactor including same
Use the Golden Query Tool to find similar entities by any field in the Knowledge Graph, including industry, location, and more.
Open Query Tool
Access by API
Company
Home
Press & Media
Blog
Careers
WE'RE HIRING
Products
Knowledge Graph
Query Tool
Data Requests
Knowledge Storage
API
Pricing
Enterprise
ChatGPT Plugin
Legal
Terms of Service
Enterprise Terms of Service
Privacy Policy
Help
Help center
API Documentation
Contact Us
By using this site, you agree to our
Terms of Service
.
SUBSCRIBE