Log in
Sign up
Golden has been acquired by ComplyAdvantage.Read about it here ⟶
‌

US Patent 10755895 Ion energy control by RF pulse shape

OverviewStructured DataIssuesContributorsActivity
Is a
Patent
Patent
0
Current Assignee
Lam Research
Lam Research
0
Date Filed
December 2, 2016
0
Date of Patent
August 25, 2020
0
Patent Applicant
Lam Research
Lam Research
0
Patent Application Number
15367469
0
Patent Citations
‌
US Patent 10325760 System, method and apparatus for using optical data to monitor RF generator operations
‌
US Patent 10032605 Methods and apparatus for controlling plasma in a plasma processing system
‌
US Patent 10340122 Systems and methods for tailoring ion energy distribution function by odd harmonic mixing
Patent Citations Received
‌
US Patent 11462390 Multi-level parameter and frequency pulsing with a low angular spread
0
‌
US Patent 11266004 Plasma generation device including matching device, and impedance matching method
Patent Jurisdiction
United States Patent and Trademark Office
United States Patent and Trademark Office
0
Patent Number
10755895
0
Patent Primary Examiner
‌
Amy Cohen Johnson
0

Find more entities like US Patent 10755895 Ion energy control by RF pulse shape

Use the Golden Query Tool to find similar entities by any field in the Knowledge Graph, including industry, location, and more.
Open Query Tool
Access by API
Golden Query Tool
Golden logo
By using this site, you agree to our Terms of Service.