Log in
Sign up
Golden has been acquired by ComplyAdvantage.Read about it here ⟶
‌

US Patent 10755895 Ion energy control by RF pulse shape

OverviewStructured DataIssuesContributorsActivity

All edits

Edits on 22 May, 2023
"Remove website redirecting to Patent Public Search front page"
Golden AI profile picture
Golden AI
edited on 22 May, 2023
Edits made to:
Infobox (-1 properties)
Infobox
Official Website
https://pdfpiw.uspto.gov/.piw?Docid=107558950
Edits on 29 Apr, 2023
"update citations for inverse infoboxes"
Golden AI profile picture
Golden AI
edited on 29 Apr, 2023
Edits on 22 Apr, 2023
"update citations for inverse infoboxes"
Golden AI profile picture
Golden AI
edited on 22 Apr, 2023
Edits on 6 Apr, 2023
"update citations for inverse infoboxes"
Golden AI profile picture
Golden AI
edited on 6 Apr, 2023
Edits on 29 Mar, 2023
"update citations for inverse infoboxes"
Golden AI profile picture
Golden AI
edited on 29 Mar, 2023
Edits on 8 Oct, 2022
"update inverses"
Golden AI profile picture
Golden AI
edited on 8 Oct, 2022
Edits made to:
Infobox (+1 properties)
Infobox
Patent Citations Received
‌
US Patent 11462390 Multi-level parameter and frequency pulsing with a low angular spread
0
Edits on 25 Sep, 2022
"Entity importer update"
Golden AI profile picture
Golden AI
edited on 25 Sep, 2022
Infobox
Is a
Patent
Patent
0
Patent Applicant
Lam Research
Lam Research
0
Current Assignee
Lam Research
Lam Research
0
Patent Jurisdiction
United States Patent and Trademark Office
United States Patent and Trademark Office
0
Patent Number
107558950
Date of Patent
August 25, 2020
0
Patent Application Number
153674690
Date Filed
December 2, 2016
0
Official Website
https://pdfpiw.uspto.gov/.piw?Docid=107558950
Patent Citations
‌
US Patent 10032605 Methods and apparatus for controlling plasma in a plasma processing system
0
‌
US Patent 10325760 System, method and apparatus for using optical data to monitor RF generator operations
0
‌
US Patent 10340122 Systems and methods for tailoring ion energy distribution function by odd harmonic mixing
0
Patent Citations Received
‌
US Patent 11266004 Plasma generation device including matching device, and impedance matching method
0
Patent Primary Examiner
‌
Amy Cohen Johnson
0
Edits on 24 Sep, 2022
"update citations for inverse infoboxes"
Golden AI profile picture
Golden AI
edited on 24 Sep, 2022
Edits on 8 Jun, 2022
"Entity importer update"
Golden AI profile picture
Golden AI
edited on 8 Jun, 2022
Edits made to:
Infobox (+1 properties)
Infobox
Website URL
https://pdfpiw.uspto.gov/.piw?Docid=10755895
Edits on 3 Mar, 2022
"update inverses"
Golden AI profile picture
Golden AI
edited on 3 Mar, 2022
Edits made to:
Infobox (+1 properties)
Infobox
Patent citations received
‌
US Patent 11266004 Plasma generation device including matching device, and impedance matching method
Edits on 6 Feb, 2022
"Created via: Entity Importer"
Golden AI profile picture
Golden AI
created this topic on 6 Feb, 2022
Edits made to:
Infobox (+12 properties)
‌

 US Patent 10755895 Ion energy control by RF pulse shape

Infobox
Is a
Patent
Patent
Patent applicant
Lam Research
Lam Research
Current assignee
Lam Research
Lam Research
Patent jurisdiction
United States Patent and Trademark Office
United States Patent and Trademark Office
Patent number
10755895
Date of patent
August 25, 2020
Patent application number
15367469
Date Filed
December 2, 2016
Patent citations
‌
US Patent 10032605 Methods and apparatus for controlling plasma in a plasma processing system
‌
US Patent 10325760 System, method and apparatus for using optical data to monitor RF generator operations
‌
US Patent 10340122 Systems and methods for tailoring ion energy distribution function by odd harmonic mixing
Patent primary examiner
‌
Amy Cohen Johnson

Find more entities like US Patent 10755895 Ion energy control by RF pulse shape

Use the Golden Query Tool to find similar entities by any field in the Knowledge Graph, including industry, location, and more.
Open Query Tool
Access by API
Golden Query Tool
Golden logo
By using this site, you agree to our Terms of Service.