Log in
Sign up
Golden has been acquired by ComplyAdvantage.Read about it here ⟶
‌

US Patent 10685836 Etching substrates using ALE and selective deposition

OverviewStructured DataIssuesContributorsActivity

All edits

Edits on 29 Jul, 2023
"Resolve patent citation"
Golden AI profile picture
Golden AI
edited on 29 Jul, 2023
Infobox
Patent Citations Received
‌
US Patent 11450513 Atomic layer etching and smoothing of refractory metals and other high surface binding energy materials
0
Edits on 21 May, 2023
"Remove website redirecting to Patent Public Search front page"
Golden AI profile picture
Golden AI
edited on 21 May, 2023
Edits made to:
Infobox (-1 properties)
Infobox
Official Website
https://pdfpiw.uspto.gov/.piw?Docid=106858360
Edits on 22 Apr, 2023
"update citations for inverse infoboxes"
Golden AI profile picture
Golden AI
edited on 22 Apr, 2023
Edits on 5 Apr, 2023
"update citations for inverse infoboxes"
Golden AI profile picture
Golden AI
edited on 5 Apr, 2023
Edits on 4 Apr, 2023
"update citations for inverse infoboxes"
Golden AI profile picture
Golden AI
edited on 4 Apr, 2023
Edits on 1 Apr, 2023
"update citations for inverse infoboxes"
Golden AI profile picture
Golden AI
edited on 1 Apr, 2023
Edits on 29 Mar, 2023
"update citations for inverse infoboxes"
Golden AI profile picture
Golden AI
edited on 29 Mar, 2023
Edits on 27 Sep, 2022
"Entity importer update"
Golden AI profile picture
Golden AI
edited on 27 Sep, 2022
Infobox
Is a
Patent
Patent
0
Patent Applicant
Lam Research
Lam Research
0
Current Assignee
Lam Research
Lam Research
0
Patent Jurisdiction
United States Patent and Trademark Office
United States Patent and Trademark Office
0
Patent Number
106858360
Date of Patent
June 16, 2020
0
Patent Application Number
163610830
Date Filed
March 21, 2019
0
Official Website
https://pdfpiw.uspto.gov/.piw?Docid=106858360
Patent Citations
‌
US Patent 10056268 Limiting electronic package warpage
0
‌
US Patent 10096487 Atomic layer etching of tungsten and other metals
0
‌
US Patent 10269566 Etching substrates using ale and selective deposition
0
‌
US Patent 10304659 Ale smoothness: in and outside semiconductor industry
0
Patent Citations Received
‌
US Patent 10727073 Atomic layer etching 3D structures: Si and SiGe and Ge smoothness on horizontal and vertical surfaces
0
‌
US Patent 10796912 Eliminating yield impact of stochastics in lithography
0
‌
US Patent 10832909 Atomic layer etch, reactive precursors and energetic sources for patterning applications
0
‌
US Patent 11257674 Eliminating yield impact of stochastics in lithography
0
‌
US Patent 11450513 Atomic layer etching and smoothing of refractory metals and other high surface binding energy materials
0
Patent Primary Examiner
‌
Shamim Ahmed
0
Edits on 24 Sep, 2022
"update citations for inverse infoboxes"
Golden AI profile picture
Golden AI
edited on 24 Sep, 2022
Edits on 24 Sep, 2022
"update citations for inverse infoboxes"
Golden AI profile picture
Golden AI
edited on 24 Sep, 2022
Edits on 23 Sep, 2022
"update citations for inverse infoboxes"
Golden AI profile picture
Golden AI
edited on 23 Sep, 2022
"update citations for inverse infoboxes"
Golden AI profile picture
Golden AI
edited on 22 Sep, 2022
Edits on 21 Sep, 2022
"update inverses"
Golden AI profile picture
Golden AI
edited on 21 Sep, 2022
Edits on 8 Jun, 2022
"Entity importer update"
Golden AI profile picture
Golden AI
edited on 8 Jun, 2022
Edits made to:
Infobox (+1 properties)
Infobox
Website URL
https://pdfpiw.uspto.gov/.piw?Docid=10685836
Edits on 23 Feb, 2022
"update inverses"
Golden AI profile picture
Golden AI
edited on 23 Feb, 2022
Edits made to:
Infobox (+1 properties)
Infobox
Patent citations received
‌
US Patent 11257674 Eliminating yield impact of stochastics in lithography
Edits on 7 Feb, 2022
"update inverses"
Golden AI profile picture
Golden AI
edited on 7 Feb, 2022
Edits on 7 Feb, 2022
"update inverses"
Golden AI profile picture
Golden AI
edited on 7 Feb, 2022
Edits made to:
Infobox (+1 properties)
Infobox
Patent citations received
‌
US Patent 10796912 Eliminating yield impact of stochastics in lithography
Edits on 5 Feb, 2022
"update inverses"
Golden AI profile picture
Golden AI
edited on 5 Feb, 2022
Edits on 4 Feb, 2022
"Created via: Entity Importer"
Golden AI profile picture
Golden AI
created this topic on 4 Feb, 2022
Edits made to:
Infobox (+13 properties)
‌

 US Patent 10685836 Etching substrates using ALE and selective deposition

Infobox
Is a
Patent
Patent
Patent applicant
Lam Research
Lam Research
Current assignee
Lam Research
Lam Research
Patent jurisdiction
United States Patent and Trademark Office
United States Patent and Trademark Office
Patent number
10685836
Date of patent
June 16, 2020
Patent application number
16361083
Date Filed
March 21, 2019
Patent citations
‌
US Patent 10056268 Limiting electronic package warpage
‌
US Patent 10096487 Atomic layer etching of tungsten and other metals
‌
US Patent 10269566 Etching substrates using ale and selective deposition
‌
US Patent 10304659 Ale smoothness: in and outside semiconductor industry
Patent primary examiner
‌
Shamim Ahmed

Find more entities like US Patent 10685836 Etching substrates using ALE and selective deposition

Use the Golden Query Tool to find similar entities by any field in the Knowledge Graph, including industry, location, and more.
Open Query Tool
Access by API
Golden Query Tool
Golden logo
By using this site, you agree to our Terms of Service.