Log in
Sign up
Golden has been acquired by ComplyAdvantage.Read about it here ⟶
‌

US Patent 10672590 Frequency tuning for a matchless plasma source

OverviewStructured DataIssuesContributorsActivity
Is a
Patent
Patent
0
Current Assignee
Lam Research
Lam Research
0
Date Filed
March 14, 2018
0
Date of Patent
June 2, 2020
0
Patent Applicant
Lam Research
Lam Research
0
Patent Application Number
15921266
0
Patent Citations
‌
US Patent 10264663 Matchless plasma source for semiconductor wafer fabrication
Patent Citations Received
‌
US Patent 11335539 Systems and methods for optimizing power delivery to an electrode of a plasma chamber
Patent Jurisdiction
United States Patent and Trademark Office
United States Patent and Trademark Office
0
Patent Number
10672590
0
Patent Primary Examiner
‌
Renan Luque
0

Find more entities like US Patent 10672590 Frequency tuning for a matchless plasma source

Use the Golden Query Tool to find similar entities by any field in the Knowledge Graph, including industry, location, and more.
Open Query Tool
Access by API
Golden Query Tool
Golden logo
By using this site, you agree to our Terms of Service.