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US Patent 10672590 Frequency tuning for a matchless plasma source

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Edits on 23 May, 2023
"Remove website redirecting to Patent Public Search front page"
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edited on 23 May, 2023
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Infobox (-1 properties)
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Official Website
https://pdfpiw.uspto.gov/.piw?Docid=106725900
Edits on 4 Apr, 2023
"update citations for inverse infoboxes"
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edited on 4 Apr, 2023
Edits on 22 Mar, 2023
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edited on 22 Mar, 2023
Infobox
Is a
Patent
Patent
0
Patent Applicant
Lam Research
Lam Research
0
Current Assignee
Lam Research
Lam Research
0
Patent Jurisdiction
United States Patent and Trademark Office
United States Patent and Trademark Office
0
Patent Number
106725900
Date of Patent
June 2, 2020
0
Patent Application Number
159212660
Date Filed
March 14, 2018
0
Official Website
https://pdfpiw.uspto.gov/.piw?Docid=106725900
Patent Citations
‌
US Patent 10264663 Matchless plasma source for semiconductor wafer fabrication
0
Patent Citations Received
‌
US Patent 11335539 Systems and methods for optimizing power delivery to an electrode of a plasma chamber
0
Patent Primary Examiner
‌
Renan Luque
0
Edits on 24 Sep, 2022
"update citations for inverse infoboxes"
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edited on 24 Sep, 2022
Edits on 22 Sep, 2022
"update citations for inverse infoboxes"
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edited on 22 Sep, 2022
Edits on 8 Jun, 2022
"Entity importer update"
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edited on 8 Jun, 2022
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Infobox (+1 properties)
Infobox
Website URL
https://pdfpiw.uspto.gov/.piw?Docid=10672590
Edits on 19 May, 2022
"update inverses"
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Golden AI
edited on 19 May, 2022
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Infobox (+1 properties)
Infobox
Patent citations received
‌
US Patent 11335539 Systems and methods for optimizing power delivery to an electrode of a plasma chamber
Edits on 4 Feb, 2022
"Created via: Entity Importer"
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created this topic on 4 Feb, 2022
Edits made to:
Infobox (+10 properties)
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 US Patent 10672590 Frequency tuning for a matchless plasma source

Infobox
Is a
Patent
Patent
Patent applicant
Lam Research
Lam Research
Current assignee
Lam Research
Lam Research
Patent jurisdiction
United States Patent and Trademark Office
United States Patent and Trademark Office
Patent number
10672590
Date of patent
June 2, 2020
Patent application number
15921266
Date Filed
March 14, 2018
Patent citations
‌
US Patent 10264663 Matchless plasma source for semiconductor wafer fabrication
Patent primary examiner
‌
Renan Luque

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