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US Patent 10622214 Tungsten defluorination by high pressure treatment

Patent 10622214 was granted and assigned to Applied Materials on April, 2020 by the United States Patent and Trademark Office.

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Patent Citations Received
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US Patent 11881411 High pressure annealing process for metal containing materials
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edited on 13 Sep, 2023
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Patent Citations Received
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US Patent 11756803 Gas delivery system for high pressure processing chamber
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US Patent 11749555 Semiconductor processing system
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US Patent 11705337 Tungsten defluorination by high pressure treatment
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edited on 5 Jul, 2023
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US Patent 11694912 High pressure and high temperature anneal chamber
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Official Website
https://pdfpiw.uspto.gov/.piw?Docid=106222140
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US Patent 11610773 Condenser system for high pressure processing system
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Patent Citations Received
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US Patent 11361978 Gas delivery module
0
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US Patent 11527421 Gas delivery system for high pressure processing chamber
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US Patent 11469113 High pressure and high temperature anneal chamber
0
Edits on 8 Oct, 2022
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edited on 8 Oct, 2022
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Patent Citations Received
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US Patent 11462417 High pressure and high temperature anneal chamber
0
Edits on 26 Sep, 2022
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Infobox
Is a
Patent
Patent
0
Patent Applicant
Applied Materials
Applied Materials
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Current Assignee
Applied Materials
Applied Materials
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Patent Jurisdiction
United States Patent and Trademark Office
United States Patent and Trademark Office
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Patent Number
106222140
Date of Patent
April 14, 2020
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Patent Application Number
156057690
Date Filed
May 25, 2017
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Official Website
https://pdfpiw.uspto.gov/.piw?Docid=106222140
Patent Citations
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US Patent 10083834 Methods of forming self-aligned vias
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Patent Citations Received
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US Patent 11361978 Gas delivery module
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Patent Primary Examiner
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Jay C Chang
0
Edits on 25 Sep, 2022
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edited on 25 Sep, 2022
Edits on 23 Sep, 2022
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Golden AI
edited on 23 Sep, 2022
Infobox
Patent Citations Received
‌
US Patent 11361978 Gas delivery module
0
Edits on 15 Jun, 2022
"update inverses"
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Golden AI
edited on 15 Jun, 2022
Edits made to:
Infobox (+1 properties)
Infobox
Patent citations received
‌
US Patent 11361978 Gas delivery module
Edits on 8 Jun, 2022
"Entity importer update"
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Golden AI
edited on 8 Jun, 2022
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Website URL
https://pdfpiw.uspto.gov/.piw?Docid=10622214

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