US Patent 10573539 Substrate liquid processing apparatus
Patent 10573539 was granted and assigned to Tokyo Electron on February, 2020 by the United States Patent and Trademark Office.
Is a
Current Assignee
Date Filed
December 15, 2015
Date of Patent
February 25, 2020
Patent Applicant
Patent Application Number
15535882
Patent Inventor Names
Yasuhiro Takaki
0
Koji Tanaka
0
Shinichi Umeno
0
Takami Satoh
0
Atsushi Anamoto
0
Hiroshi Komiya
0
Patent Jurisdiction
Patent Number
Patent Primary Examiner
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