Log in
Sign up
Golden has been acquired by ComplyAdvantage.Read about it here ⟶
‌

US Patent 10566213 Atomic layer etching of tantalum

Patent 10566213 was granted and assigned to Lam Research on February, 2020 by the United States Patent and Trademark Office.

OverviewStructured DataIssuesContributorsActivity
Is a
Patent
Patent
0
Current Assignee
Lam Research
Lam Research
0
Date Filed
July 30, 2018
0
Date of Patent
February 18, 2020
0
Patent Applicant
Lam Research
Lam Research
0
Patent Application Number
16049320
0
Patent Citations
‌
US Patent 10374144 Dry plasma etch method to pattern MRAM stack
‌
US Patent 10056264 Atomic layer etching of GaN and other III-V materials
‌
US Patent 10096487 Atomic layer etching of tungsten and other metals
0
‌
US Patent 10269566 Etching substrates using ale and selective deposition
‌
US Patent 10494715 Atomic layer clean for removal of photoresist patterning scum
Patent Citations Received
‌
US Patent 11450513 Atomic layer etching and smoothing of refractory metals and other high surface binding energy materials
‌
US Patent 10790157 Achieving etching selectivity for atomic layer etching processes by utilizing material-selective deposition phenomena
‌
US Patent 10796912 Eliminating yield impact of stochastics in lithography
‌
US Patent 10832909 Atomic layer etch, reactive precursors and energetic sources for patterning applications
‌
US Patent 11069535 Atomic layer etch of tungsten for enhanced tungsten deposition fill
‌
US Patent 11257674 Eliminating yield impact of stochastics in lithography
‌
US Patent 11239094 Designer atomic layer etching
‌
US Patent 10763083 High energy atomic layer etching
Patent Inventor Names
Keren Jacobs Kanarik
0
Taeseung Kim
0
Patent Jurisdiction
United States Patent and Trademark Office
United States Patent and Trademark Office
0
Patent Number
10566213
0
Patent Primary Examiner
‌
Duy-Vu N Deo
0

Find more entities like US Patent 10566213 Atomic layer etching of tantalum

Use the Golden Query Tool to find similar entities by any field in the Knowledge Graph, including industry, location, and more.
Open Query Tool
Access by API
Golden Query Tool
Golden logo
By using this site, you agree to our Terms of Service.