US Patent 10566212 Designer atomic layer etching
Patent 10566212 was granted and assigned to Lam Research on February, 2020 by the United States Patent and Trademark Office.
Is a
Current Assignee
Date Filed
December 13, 2017
Date of Patent
February 18, 2020
Patent Applicant
Patent Application Number
15841205
Patent Citations Received
•••
Patent Jurisdiction
Patent Number
Patent Primary Examiner
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