US Patent 10553485 Methods of producing fully self-aligned vias and contacts
Patent 10553485 was granted and assigned to Micromaterials, Inc on February, 2020 by the United States Patent and Trademark Office.
Is a
Current Assignee
Date Filed
June 22, 2018
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Date of Patent
February 4, 2020
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Patent Applicant
Patent Application Number
16015714
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Patent Inventor Names
Sanjay Natarajan
0
Ying Zhang
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Abhijit Basu Mallick
0
Ho-yung Hwang
0
Nitin K. Ingle
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Regina Freed
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Uday Mitra
0
Patent Jurisdiction
Patent Number
Patent Primary Examiner
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