Is a
Patent attributes
Patent Applicant
Current Assignee
Patent Jurisdiction
Patent Number
Patent Inventor Names
Kirankumar Savandaiah0
Ruxiao An0
Ryan Hanson0
Date of Patent
January 28, 2020
0Patent Application Number
149608900
Date Filed
December 7, 2015
0Patent Citations Received
Patent Primary Examiner
Patent abstract
Embodiments of process kit shields and process chambers incorporating same are provided herein. In some embodiments, a one-piece process kit shield includes a cylindrical body having an upper portion and a lower portion; a heat transfer channel extending through the upper portion; and a cover ring section extending radially inward from the lower portion.
Timeline
No Timeline data yet.
Further Resources
No Further Resources data yet.
