US Patent 10541113 Chamber with flow-through source
Patent 10541113 was granted and assigned to Applied Materials on January, 2020 by the United States Patent and Trademark Office.
Is a
Current Assignee
Date Filed
March 4, 2019
Date of Patent
January 21, 2020
Patent Applicant
Patent Application Number
16291494
Patent Citations
•••
Patent Jurisdiction
Patent Number
Patent Primary Examiner
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