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US Patent 10529585 Dry stripping of boron carbide hardmask

Patent 10529585 was granted and assigned to Applied Materials on January, 2020 by the United States Patent and Trademark Office.

OverviewStructured DataIssuesContributorsActivity
Is a
Patent
Patent
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Current Assignee
Applied Materials
Applied Materials
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Date Filed
June 1, 2018
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Date of Patent
January 7, 2020
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Patent Applicant
Applied Materials
Applied Materials
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Patent Application Number
15995698
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Patent Citations
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US Patent 10083834 Methods of forming self-aligned vias
Patent Citations Received
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US Patent 11881411 High pressure annealing process for metal containing materials
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US Patent 11469113 High pressure and high temperature anneal chamber
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US Patent 11689080 Supercritical CO2 cooled electrical machine
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US Patent 11694912 High pressure and high temperature anneal chamber
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US Patent 11705337 Tungsten defluorination by high pressure treatment
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US Patent 11749555 Semiconductor processing system
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US Patent 11756803 Gas delivery system for high pressure processing chamber
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US Patent 11361978 Gas delivery module
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US Patent 11462417 High pressure and high temperature anneal chamber
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US Patent 11527421 Gas delivery system for high pressure processing chamber
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•••
Patent Inventor Names
Shishi Jiang
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Abhijit Basu Mallick
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Kurtis Leschkies
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Pramit Manna
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Patent Jurisdiction
United States Patent and Trademark Office
United States Patent and Trademark Office
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Patent Number
10529585
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Patent Primary Examiner
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Jiong-Ping Lu
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