US Patent 10403475 Tunable multi-zone gas injection system
Patent 10403475 was granted and assigned to Lam Research on September, 2019 by the United States Patent and Trademark Office.
Is a
Current Assignee
Date Filed
May 4, 2015
0
Date of Patent
September 3, 2019
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Patent Applicant
Patent Application Number
14703066
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Patent Citations Received
Patent Inventor Names
David J. Cooperberg
0
Douglas Ratto
0
Harmeet Singh
0
Neil Benjamin
0
Vahid Vahedi
0
Patent Jurisdiction
Patent Number
Patent Primary Examiner
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