US Patent 10283398 Substrate placing table
Patent 10283398 was granted and assigned to Tokyo Electron on May, 2019 by the United States Patent and Trademark Office.
Is a
Current Assignee
Date Filed
September 17, 2015
Date of Patent
May 7, 2019
Patent Applicant
Patent Application Number
15521217
Patent Citations Received
Patent Jurisdiction
Patent Number
Patent Primary Examiner
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