US Patent 10256144 Process integration approach of selective tungsten via fill
Patent 10256144 was granted and assigned to Applied Materials on April, 2019 by the United States Patent and Trademark Office.
Is a
Current Assignee
Date Filed
April 26, 2017
0
Date of Patent
April 9, 2019
0
Patent Applicant
Patent Application Number
15498024
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Patent Inventor Names
Feiyue Ma
0
Vikash Banthia
0
Yu Lei
0
Zhiyuan Wu
0
He Ren
0
Hua Al
0
Kai Wu
0
Mehul B. Naik
0
Patent Jurisdiction
Patent Number
Patent Primary Examiner
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