US Patent 10128134 Substrate transfer method and processing system
Patent 10128134 was granted and assigned to Tokyo Electron on November, 2018 by the United States Patent and Trademark Office.
Is a
Current Assignee
Date Filed
September 7, 2015
0
Date of Patent
November 13, 2018
0
Patent Applicant
Patent Application Number
15512244
0
Patent Citations Received
Patent Inventor Names
Keisuke Kondoh
0
Patent Jurisdiction
Patent Number
Patent Primary Examiner
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