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US Patent 10087525 Variable gap hard stop design

Overview Structured Data Issues Contributors Activity

Is a

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Date Filed

August 4, 2015

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Date of Patent

October 2, 2018

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Patent Application Number

14817953

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Patent Citations Received

US Patent D959525 Heater block for bonding apparatus

US Patent 11286558 Methods for depositing a molybdenum nitride film on a surface of a substrate by a cyclical deposition process and related semiconductor device structures including a molybdenum nitride film

US Patent 11289326 Method for reforming amorphous carbon polymer film

US Patent D947913 Susceptor shaft

US Patent 11295980 Methods for depositing a molybdenum metal film over a dielectric surface of a substrate by a cyclical deposition process and related semiconductor device structures

US Patent 11296189 Method for depositing a phosphorus doped silicon arsenide film and related semiconductor device structures

US Patent 10229833 Methods for forming a transition metal nitride film on a substrate by atomic layer deposition and related semiconductor device structures

US Patent 10249524 Cassette holder assembly for a substrate cassette and holding member for use in such assembly

US Patent 10249577 Method of forming metal interconnection and method of fabricating semiconductor apparatus using the method

US Patent 10262859 Process for forming a film on a substrate using multi-port injection assemblies

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Patent Inventor Names

Shawn Whaley

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Michael Schmotzer

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Patent Jurisdiction

United States Patent and Trademark Office

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Patent Number

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Patent Primary Examiner

Joseph A Miller, Jr.

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