Log in
Sign up
Golden has been acquired by ComplyAdvantage.Read about it here ⟶
‌

US Patent 10056225 Adjusting substrate temperature to improve CD uniformity

Patent 10056225 was granted and assigned to Lam Research on August, 2018 by the United States Patent and Trademark Office.

OverviewStructured DataIssuesContributorsActivity
Is a
Patent
Patent
Current Assignee
Lam Research
Lam Research
Date Filed
December 23, 2013
Date of Patent
August 21, 2018
Patent Applicant
Lam Research
Lam Research
Patent Application Number
14139238
Patent Citations Received
‌
US Patent 12061227 Integrated heater and temperature measurement
0
‌
US Patent 11693051 Thermal head for independent control of zones
0
‌
US Patent 11754620 DUT placement and handling for active thermal interposer device
‌
US Patent 11774492 Test system including active thermal interposer device
‌
US Patent 11841392 Integrated test cell using active thermal interposer (ATI) with parallel socket actuation
0
‌
US Patent 11852678 Multi-input multi-zone thermal control for device testing
0
‌
US Patent 11940487 Thermal solution for massively parallel testing
0
‌
US Patent 11493551 Integrated test cell using active thermal interposer (ATI) with parallel socket actuation
‌
US Patent 11549981 Thermal solution for massively parallel testing
‌
US Patent 11567119 Testing system including active thermal interposer device
•••
Patent Inventor Names
Keith William Gaff
0
Vahid Vahedi
0
Harmeet Singh
0
Keith Comendant
0
Patent Jurisdiction
United States Patent and Trademark Office
United States Patent and Trademark Office
Patent Number
10056225
Patent Primary Examiner
‌
Keath T Chen

Find more entities like US Patent 10056225 Adjusting substrate temperature to improve CD uniformity

Use the Golden Query Tool to find similar entities by any field in the Knowledge Graph, including industry, location, and more.
Open Query Tool
Access by API
Golden Query Tool
Golden logo
By using this site, you agree to our Terms of Service.