SEMATECH

US Patent 7128427 Method and apparatus for fluid handling in immersion lithography

US Patent 7332433 Methods of modulating the work functions of film layers

US Patent 7430051 Methods for characterizing semiconductor material using optical metrology

US Patent 7497913 Method and apparatus for colloidal particle cleaning

US Patent 7504192 Soft pellicle for 157 and 193 nm and method of making same

US Patent 7580138 Methods and systems for characterizing semiconductor materials

US Patent 7595204 Methods and systems for determining trapped charge density in films

US Patent 7626712 Methods and systems for characterizing semiconductor materials

US Patent 7629556 Laser nozzle methods and apparatus for surface cleaning

US Patent 7709180 Soft pellicle and method of making same

US Patent 7732120 Method for making soft pellicles

US Patent 7736954 Methods for nanoscale feature imprint molding

US Patent 7741168 Systems and methods for fabricating nanometric-scale semiconductor devices with dual-stress layers using double-stress oxide/nitride stacks

US Patent 7855139 Systems and methods for controlling the effective dielectric constant of materials used in a semiconductor device

US Patent 7921859 Method and apparatus for an in-situ ultraviolet cleaning tool