Michael A Lyons

US Patent 11168975 Phase delay extraction and compensation method in PGC phase demodulation technology

US Patent 11175125 Frequency-domain optical coherence tomography with extended field-of-view and reduction of aliasing artifacts

US Patent 11175126 Automated polarization control

US Patent 11175224 Optical refraction barometer

US Patent 7259864 Optical underwater acoustic sensor

US Patent 7271917 Lithographic apparatus, position quantity detection system and method

US Patent 7274460 Stimulated rate optical power measurement in a fiber optic gyroscope

US Patent 7277183 Vibration resistant interferometry

US Patent 7283249 Lithographic apparatus and a method of calibrating such an apparatus

US Patent 7295326 Apparatus and method for measuring the optical performance of an optical element

US Patent 7298490 Hydrogen sensor based upon quadrupole absorption spectroscopy

US Patent 7298498 Optical property measuring apparatus and optical property measuring method, exposure apparatus and exposure method, and device manufacturing method

US Patent 7301643 Arrangement for building a miniaturized fourier transform interferometer for optical radiation according to the michelson principle or a principle derived therefrom

US Patent 7301644 Enhanced optical coherence tomography for anatomical mapping

US Patent 7301645 In-situ critical dimension measurement

US Patent 7304746 Common-path point-diffraction phase-shifting interferometer

US Patent 7304747 Methods and systems for determining optical properties using low-coherence interference signals

US Patent 7307733 Optical image measuring apparatus and optical image measuring method

US Patent 7307735 Method for determining the depth of a buried structure

US Patent 7310151 Interferometric optical apparatus and method using wavefront division

US Patent 7310152 Interferometer assemblies having reduced cyclic errors and system using the interferometer assemblies

US Patent 7317540 Method of full-color optical coherence tomography

US Patent 7324206 Method for determination/compensation of bias errors/random walk errors induced by the light source in fiber-optic Sagnac interferometers

US Patent 7324211 Optical tomographic image obtaining apparatus

US Patent 7324214 Interferometer and method for measuring characteristics of optically unresolved surface features

US Patent 7324215 Non-destructive optical imaging system for enhanced lateral resolution

US Patent 7327464 System and method for coherent optical inspection

US Patent 7327468 Opto-acoustic apparatus with optical heterodyning for measuring solid surfaces and thin films

US Patent 7327469 Method for compensating errors in interferometric surface metrology

US Patent 7330272 Discrete quarter wave plates for displacement measuring interferometers

US Patent 7333207 Confocal 4-pi microscope and method for confocal 4-pi microscopy

US Patent 7333212 Method and apparatus for measuring the absorption coefficient and the reduced scattering coefficient of a multiple scattering medium

US Patent 7333215 Adaptive optics control system

US Patent 7336363 Interferometric beam combination

US Patent 7336369 Multi-axis interferometer system using independent, single axis interferometers

US Patent 7336372 Noninvasive optical imaging by speckle ensemble

US Patent 7349098 Simultaneous beam-focus and coherence-gate tracking for real-time optical coherence tomography

US Patent 7352473 Lithographic apparatus, device manufacturing method, and computer program

US Patent 7355718 Pressure sensor having two materials with different coefficients of thermal expansion configured to reduce temperature dependence

US Patent 7355721 Optical coherence tomography imaging

US Patent 7355723 Apparatus comprising a high-signal-to-noise displacement sensor and method therefore

US Patent 7359059 Chip scale atomic gyroscope

US Patent 7359060 Multi-mode sampling probes

US Patent 7359063 Heterodyne array detector

US Patent 7359065 Method of combining holograms

US Patent 7359067 Optical displacement sensor comprising a wavelength-tunable optical source

US Patent 7362447 Low walk-off interferometer

US Patent 11181420 Bendable substrate with a device

US Patent 11181503 Stationary devices for determination of magnitude and polarity of electrophoretic mobility and zeta potential

US Patent 7363817 System and technique for detecting the presence of foreign material

US Patent 7369248 Device for measuring an optical path length difference

US Patent 7369249 Apparatus for measuring differential mode delay of multimode optical fiber

US Patent 7372573 Multigas monitoring and detection system

US Patent 7375816 Dither motor having integrated drive and pickoff transducers

US Patent 7375822 Rotation and translation measurement

US Patent 7379186 Chirp indicator of ultrashort optical pulse

US Patent 7379189 Temperature/thickness measuring apparatus, temperature/thickness measuring method, temperature/thickness measuring system, control system and control method

US Patent 7382453 Apparatus and method for characterizing an interfacial property of a dispersion

US Patent 7382465 Optical vibrometer

US Patent 7382467 Interferometric measuring device

US Patent 7394546 Method and apparatus for full phase interferometry

US Patent 7397571 Methods and systems for laser mode stabilization

US Patent 7400409 Coherence microscope using interference of time incoherent light to achieve depth resolution in a measurement specimen

US Patent 7400411 Method for optically testing semiconductor devices

US Patent 7403289 Interferometry method for ellipsometry, reflectometry, and scatterometry measurements, including characterization of thin film structures

US Patent 7403290 Method and means for determining the shape of a rough surface of an object

US Patent 7405831 Laser scanning interferometric surface metrology

US Patent 7408648 Method for tomographically displaying a cavity by optical coherence tomography (OCT) and an OCT device for carrying out the method

US Patent 7414728 Reconfigurable polarization independent interferometers and methods of stabilization

US Patent 7414729 System and method for coherent anti-Stokes Raman scattering endoscopy

US Patent 7417744 Coherent hybrid electromagnetic field imaging

US Patent 7420686 Wavelength measurement method based on combination of two signals in quadrature

US Patent 7423761 Light source apparatus and optical tomography imaging apparatus

US Patent 7423762 Rugged fabry-perot pressure sensor

US Patent 7423764 Integrated interference scanning method

US Patent 7423766 Interferometric optical profiler

US Patent 7426035 System and method for chemical sensing using trace gas detection

US Patent 7428053 Common path frequency domain optical coherence reflectometry/tomography device

US Patent 7433042 Spatially corrected full-cubed hyperspectral imager

US Patent 7433047 Runout characterization

US Patent 7433050 Exposure apparatus and exposure method

US Patent 7436517 Optical measuring apparatus

US Patent 7440107 Sampling spectrophotometer comprising an interferometer

US Patent 7440111 Confocal microscope apparatus

US Patent 7440112 Method and an apparatus for shape measurement, and a frequency comb light generator

US Patent 7443510 Tunable laser for dynamic measurement

US Patent 7443512 Apparatus and method for measurement of film thickness using improved fast fourier transformation

US Patent 7443514 Diffractive null corrector employing a spatial light modulator

US Patent 7450237 Non-invasive electric-filed-detection device and method

US Patent 7450242 Optical tomography apparatus

US Patent 7450246 Measuring device and method for determining relative positions of a positioning stage configured to be moveable in at least one direction

US Patent 7456968 Sensor system and methods for improved quantitation of environmental parameters

US Patent 7456975 Methods and systems for interferometric analysis of surfaces and related applications

US Patent 7460218 Device and method for determining the properties of surfaces

US Patent 7460240 Apparatus and method for detecting deformability of cells using spatially modulated optical force microscopy

US Patent 7460242 Systems and methods for high-precision length measurement

US Patent 7463365 Measurement method and apparatus, exposure apparatus, and device manufacturing method

US Patent 7466407 Photonic crystal Raman sensors and methods including the same

US Patent 7466408 Measurement system

US Patent 7466423 Optical mapping apparatus

US Patent 7466426 Phase shifting imaging module and method of imaging

US Patent 7466427 Vibration-resistant interferometer apparatus

US Patent 7466429 Profiling complex surface structures using scanning interferometry

US Patent 7471382 Surface inspection system with improved capabilities

US Patent 7471399 Photosensing optical cavity output light

US Patent 7474401 Multi-layer alignment and overlay target and measurement method

US Patent 7474408 Low coherence interferometry utilizing phase

US Patent 7474410 Nanometer-precision tip-to-substrate control and pattern registration for scanning-probe lithography

US Patent 7474412 Etalon device and manufacturing method thereof

US Patent 7474413 Method and apparatus for analyzing interference fringe

US Patent 7477369 Apparatus for testing liquid crystal display device and testing method thereof

US Patent 7477373 Surface inspection method and surface inspection device

US Patent 7477383 System for detection of wafer defects

US Patent 7477398 Multi-beam heterodyne laser doppler vibrometer

US Patent 7480055 Two-beam interferometer for fourier transform spectroscopy with double pivot scanning mechanism

US Patent 7483145 Simultaneous phase shifting module for use in interferometry

US Patent 7483148 Ellipsometric investigation of very thin films

US Patent 7483149 Optical measuring device for measuring curved surfaces

US Patent 7483155 Structure inspection method, pattern formation method, process condition determination method and resist pattern evaluation apparatus

US Patent 7486403 Droplet shape measuring method and apparatus

US Patent 7486406 Variable tomographic scanning with wavelength scanning digital interface holography

US Patent 7489406 Optical lens system and position measurement system using the same

US Patent 7492467 Method and apparatus for measuring thickness and optical properties of a thin-film on a substrate

US Patent 7495775 Optical displacement sensor comprising a wavelength-tunable optical source

US Patent 7499184 Three-dimensional measuring apparatus and three-dimensional measuring method

US Patent 7502118 High sensitivity coherent photothermal interferometric system and method for chemical detection

US Patent 7502123 Obtaining information from optical cavity output light

US Patent 7505131 Methods and systems for dynamic range expansion

US Patent 7505139 Signal processing for a Sagnac interferometer

US Patent 7505141 Interferometric apparatus for producing an output signal characteristic of phase and/or amplitude noise of a device

US Patent 7505142 Enhanced optical coherence tomography for anatomical mapping

US Patent 7511803 Method for displaying result of measurement of eccentricity

US Patent 7511822 Optical tomographic imaging apparatus

US Patent 11187517 Coherent receiver array

US Patent 7518729 Interferometric measuring device

US Patent 7518730 Apparatus and method for chemical sensing

US Patent 7518732 Multi-axis interferometer system using independent, single axis interferometers

US Patent 7518733 Surface profiling apparatus

US Patent 7518735 Measurement method and apparatus, exposure apparatus, and device manufacturing method

US Patent 7522287 Photothermal conversion measurement apparatus, photothermal conversion measurement method, and sample cell

US Patent 7522290 Apparatus and method for inspecting semiconductor wafer

US Patent 7522292 System and method for determining a shape of a surface of an object and method of manufacturing an object having a surface of a predetermined shape

US Patent 7528959 Apparatus and method for sizing nanoparticles based on interferometric field detection

US Patent 7528960 Method for enhancing the measuring accuracy when determining the coordinates of structures on a substrate

US Patent 7535580 Image forming apparatus and image forming method

US Patent 7538859 Methods and systems for monitoring and obtaining information of at least one portion of a sample using conformal laser therapy procedures, and providing electromagnetic radiation thereto

US Patent 7538881 Frequency comb cavity enhanced spectroscopy

US Patent 7538883 Distributed strain and temperature discrimination in polarization maintaining fiber

US Patent 7538888 Method for estimating absolute distance of tracking laser interferometer and tracking laser interferometer

US Patent 7538891 Surface characterization based on lateral shearing of diffracted wave fronts to measure in-plane and out-of-plane displacement gradient fields

US Patent 7542147 Data age compensation with avalanche photodiode

US Patent 7542148 Method for measuring physical quantity of measurement object in substrate processing apparatus and storage medium storing program for implementing the method

US Patent 7542150 Displacement interferometer system and exposer using the same

US Patent 7545504 Imaging systems using unpolarized light and related methods and controllers

US Patent 7545507 Displacement measurement system

US Patent 7545511 Transmitted wavefront metrology of optics with high aberrations

US Patent 7548318 Dithering mechanism for eliminating zero-rate bias in a gyroscope

US Patent 7548321 Method for enhancing the measuring accuracy when determining the coordinates of structures on a substrate

US Patent 7554669 Spectral domain phase microscopy (SDPM) dual mode imaging systems and related methods and computer program products

US Patent 7554674 Optical displacement sensor

US Patent 7557927 Optical apparatus for capturing spectral image

US Patent 7561277 MEMS fiber optic microphone

US Patent 7561278 Interferometer using integrated retarders to reduce physical volume

US Patent 7561280 Displacement measurement sensor head and system having measurement sub-beams comprising zeroth order and first order diffraction components

US Patent 7564560 Spectrophotometer with wide inlet slit

US Patent 7564562 Method for demodulating signals from a dispersive white light interferometric sensor and its application to remote optical sensing

US Patent 7564563 Laser gyro and electronic device using the same

US Patent 7564564 Automatic set-up for instrument functions

US Patent 7564567 Sensor for measuring a vibrating surface obscured from view

US Patent 7570365 Compact tunable high-efficiency entangled photon source

US Patent 7570366 Apparatus for measuring defects in a glass sheet

US Patent 7573573 Method and particle measuring and counting apparatus with selectable channels of a specimen flow

US Patent 7576850 In-process vision detection of flaws and FOD by back field illumination

US Patent 7576866 Optical tomography system

US Patent 7576867 Position sensitive detectors in wavelength monitoring

US Patent 7576869 Three-dimensional shape measurement method and three-dimensional shape measurement apparatus

US Patent 7583389 Geometric measurement system and method of measuring a geometric characteristic of an object

US Patent 7583390 Accelerometer comprising an optically resonant cavity

US Patent 7586620 Methods and systems for interferometric analysis of surfaces and related applications

US Patent 7586621 Displacement-measuring optical scale and optical encoder using same

US Patent 7593098 High dynamic range photon-counting OTDR

US Patent 7593106 Independent measurement of dual sided properties of sheet material

US Patent 7593111 Sensor apparatus

US Patent 7593112 Systems and methods for comparative interferogram spectrometry

US Patent 7595870 Optical inspection of container walls

US Patent 7595887 Multigas monitoring and detection system

US Patent 7599071 Determining positional error of an optical component using structured light patterns

US Patent 7602483 Device for dark field illumination and method for optically scanning of object

US Patent 7602491 Optical gain approach for enhancement of overlay and alignment systems performance

US Patent 7602492 Overlay measuring method and related semiconductor fabrication equipment management system

US Patent 7602499 Measuring polarization mode dispersion

US Patent 7602507 Sensor for measuring the surface of an object

US Patent 7605912 Application of statistical inference to optical time domain reflectometer data

US Patent 7605914 Optical system and method for improving imaging properties thereof

US Patent 7605925 High-definition vertical-scan interferometry

US Patent 7609385 Method and apparatus for characterization of the response of optical devices

US Patent 7609387 Method and measuring device for measuring an absolute distance

US Patent 7609390 Measurement method and apparatus, exposure apparatus

US Patent 7609392 Harmonically matched diffraction grating pair

US Patent 7612872 Method of determining the flatness of a foundation to which a building structure, machinery or equipment is to be mounted

US Patent 7612884 Method and arrangement for optical examination or processing of a sample

US Patent 7612894 Fiber laser for ultrasonic testing

US Patent 7616319 Spectroscopic ellipsometer and polarimeter systems

US Patent 7616328 Method and system for providing a high definition triangulation system

US Patent 7619723 Refractometer

US Patent 7619743 Optical sensor utilizing hollow-core photonic bandgap fiber with low phase thermal constant

US Patent 7619746 Generating model signals for interferometry

US Patent 7623226 Optical method and device for detecting surface and structural defects of a travelling hot product

US Patent 7623242 Device and method for monitoring multiple chemical samples with a fluorescent tube

US Patent 7623247 Wavefront-aberration measuring device and exposure apparatus including the device

US Patent 7623249 Automated product profiling apparatus and product slicing system using same

US Patent 7626693 Illumination sources and customizable spectral profiles

US Patent 7630084 System and method for acquiring and evaluating optical signals

US Patent 7633625 Spectroscopic ellipsometer and polarimeter systems

US Patent 7633628 Optical lens system and position measurement system using the same

US Patent 7639366 Position-measuring device for determining the position of two objects movable with respect to each other along a measuring direction, and method for forming a reference pulse for such a position-measuring device

US Patent 7639369 Multi-object wavefront sensor with spatial filtering

US Patent 7643147 Method and system for device identification

US Patent 7643156 Sensor, multichannel sensor, sensing apparatus, and sensing method

US Patent 7646488 Positioning apparatus, exposure apparatus, and device manufacturing method

US Patent 7652769 Method and apparatus for assessing purity of vegetable oils by means of terahertz time-domain spectroscopy

US Patent 7652774 Interferometric endpoint determination in a substrate etching process

US Patent 7652775 Optical near-field generator and recording and reproduction apparatus

US Patent 7656536 Fiber-optic assay apparatus based on phase-shift interferometry

US Patent 7656538 Short-wavelength coherence tomography

US Patent 7656539 Multi-conjugate adaptive optics system for field conjugation

US Patent 7659990 Enhanced optical coherence tomography for anatomical mapping

US Patent 7659991 Colorimetric three-dimensional microscopy

US Patent 7659992 Scale reading apparatus

US Patent 7663761 Beam analyzing system and method for analyzing pulsed particle or laser beams

US Patent 7667850 Imaging system with low coherence light source

US Patent 7667851 Method and apparatus for using a two-wave mixing ultrasonic detection in rapid scanning applications

US Patent 7671978 Scatterometer-interferometer and method for detecting and distinguishing characteristics of surface artifacts

US Patent 7671997 High power broadband superluminescent diode

US Patent 7675627 Low cost fiber optic velocity sensor for sonar applications

US Patent 7684046 Method and apparatus for bandwidth measurement and bandwidth parameter calculation for laser light

US Patent 7684049 Interferometer and method for measuring characteristics of optically unresolved surface features

US Patent 7684050 Shape measuring apparatus, shape measuring method, and exposure apparatus

US Patent 7688453 Interferometry testing of lenses, and systems and devices for same

US Patent 7692798 Method for biomolecular detection and system thereof

US Patent 7697144 Optical fiber coating system and monitoring method for improved thermal performance in fiber optic sensors

US Patent 7701590 Apparatus, methods, devices, and systems in which differences and/or changes in photosensed positions and/or quantities relate to shifts and/or differences in photon energies

US Patent 7705993 Sampling of optical signals

US Patent 7705994 Monolithic displacement measuring interferometer with spatially separated but substantially equivalent optical pathways and optional dual beam outputs

US Patent 7705995 Method of determining substrate etch depth

US Patent 7710573 Device and method for the non-invasive detection and measurement of the properties of a medium

US Patent 7710578 Position measuring arrangement

US Patent 7710579 Measuring method and apparatus for measuring depth of trench pattern

US Patent 7715015 Adaptive mixing for high slew rates

US Patent 7715016 Image invariant optical speckle capturing device and method

US Patent 7728984 Method for evaluating a measured parameter

US Patent 7728988 Method and apparatus for testing conic optical surfaces

US Patent 7733497 Method and apparatus for performing optical imaging using frequency-domain interferometry

US Patent 7733499 Method for optically testing semiconductor devices

US Patent 7738117 Method of manufacturing an optical element

US Patent 7751055 Hollow core fiber optical gyro

US Patent 7751060 Position measuring method, position measuring system, and exposure apparatus

US Patent 7751064 Interference objective for annular test surfaces

US Patent 7755746 Device for testing a test object, in particular a tire, by means of a non-destructive measuring method

US Patent 7755766 Telescope interferometric maintenance evaluation tool

US Patent 7760362 Telescope interferometric maintenance evaluation tool

US Patent 7760363 Method and apparatus for simultaneously acquiring interferograms and method for solving the phase information

US Patent 7768652 Methods for mapping tissue with optical coherence tomography data

US Patent 7777888 Telescope interferometric maintenance evaluation tool

US Patent 7777894 Immersion photolithography monitoring

US Patent 7782465 High intensity fabry-perot sensor

US Patent 7787126 Method and apparatus for conjugate quadrature interferometric detection of an immunoassay

US Patent 7787128 Transducer for measuring environmental parameters

US Patent 7791731 Partial coherence interferometer with measurement ambiguity resolution

US Patent 7791737 Method and apparatus for interferometrically measuring the shape of a test object

US Patent 7800759 Eye length measurement apparatus

US Patent 7800760 System and method for high resolution imaging of cellular detail in the retina

US Patent 7800762 Fiber-based mid-infrared generation laser for laser ultrasound inspection

US Patent 7808648 Method and device for optical determination of physical properties of features, not much larger than the optical wavelength used, on a test sample

US Patent 7808651 Determining endpoint in a substrate process

US Patent 7808653 Apparatus for measuring defects in a glass sheet

US Patent 7812964 Distance measuring interferometer and encoder metrology systems for use in lithography tools

US Patent 7817280 Method and system for device identification

US Patent 7821642 Method and system of device identification

US Patent 7826060 Direct detection of localized modulation of ion concentration on an electrode-electrolyte interface

US Patent 7826065 Tuned optical cavity magnetometer

US Patent 7830523 Nondestructive inspection of a structure including the analysis of cavity electromagnetic field response

US Patent 7830526 Method and apparatus for optical frequency measurement

US Patent 7835010 Optical coherence tomography system and optical coherence tomography method

US Patent 7843572 Method and apparatus for optical imaging via spectral encoding

US Patent 7847949 Method and apparatus for optical imaging via spectral encoding

US Patent 7847951 Spectral domain phase microscopy (SDPM) dual mode imaging systems and related methods and computer program products

US Patent 7847954 Measuring the shape and thickness variation of a wafer with high slopes

US Patent 7855789 RFOG modulation error correction

US Patent 7859678 Automatic gain control for fiber optic gyroscope deterministic control loops

US Patent 7864329 Fiber optic sensor system having circulators, Bragg gratings and couplers

US Patent 7869050 Systems and methods for comparative interferogram spectrometry

US Patent 7869051 System and method for ratiometric non-linear coherent imaging

US Patent 7872759 Arrangements and methods for providing multimodality microscopic imaging of one or more biological structures

US Patent 7872761 Method for reliable optical coherence tomography scans of volumes of retinal tissue

US Patent 7872763 Device for measuring the position of at least one structure on a substrate

US Patent 7876446 Method and assembly for confocal, chromatic, interferometric and spectroscopic scanning of optical, multi-layer data memories

US Patent 7876447 Monofibre optical meter for chemical measurement

US Patent 7876452 Interferometric position-measuring devices and methods

US Patent 7876499 Objective lens

US Patent 7889349 Method and apparatus for improvement of spectrometer stability, and multivariate calibration transfer

US Patent 7889350 RFOG with reduced polarization mode induced bias error

US Patent 7889351 Systems and methods for monitoring angle random walk

US Patent 7911619 Low-noise fiber optic sensor utilizing a laser source

US Patent 7911620 Optical sensor utilizing hollow-core photonic bandgap fiber with low phase thermal constant

US Patent 7911621 Apparatus and method for controlling ranging depth in optical frequency domain imaging

US Patent 7916304 Systems and methods for 3-dimensional interferometric microscopy

US Patent 7916306 Optical device comprising a cantilever and method of fabrication and use thereof

US Patent 7920271 Apparatus and methods for enhancing optical coherence tomography imaging using volumetric filtering techniques

US Patent 7924429 Enhanced optical coherence tomography for anatomical mapping

US Patent 7924430 Optical heterodyne fourier transform interferometer

US Patent 7924432 Three-dimensional interferometric microscopy

US Patent 7924436 Method for approximating an influence of an optical system on the state of polarization of optical radiation

US Patent 7924437 Measurement method and apparatus, exposure apparatus

US Patent 7929144 Optical system and method for gas detection and monitoring

US Patent 7929148 Optical coherence tomography implementation apparatus and method of use

US Patent 7929149 Coordinate measuring machine and a method for correcting non-linearities of the interferometers of a coordinate measuring machine

US Patent 7939782 Processing method and processing apparatus using interfered laser beams

US Patent 7948632 Method and apparatus for analysis of a sample of cells

US Patent 7948635 Method for determining positions of structures on a substrate

US Patent 7948636 Interferometer and method for measuring characteristics of optically unresolved surface features

US Patent 7952722 Optical image measurement device

US Patent 7957006 System and method for optical sensing of surface motions

US Patent 7961331 Sensing a disturbance along an optical path

US Patent 7965389 Method for reconstructing the distribution of fluorophores in a non-homogeneous medium by optical tomography in continuous mode

US Patent 7965392 Optical coherence tomography device and measuring head

US Patent 7965393 Reference signal generating configuration for an interferometric miniature grating encoder readhead using fiber optic receiver channels

US Patent 7969578 Method and apparatus for performing optical imaging using frequency-domain interferometry

US Patent 7969581 Determining endpoint in a substrate process

US Patent 7973940 Optical object measurement apparatus

US Patent 7973941 Reference signal generating configuration for an interferometric miniature grating encoder readhead using fiber optic receiver channels

US Patent 7978335 System for producing tomographic image by optical tomography

US Patent 7978336 Three wavelength quantitative imaging systems

US Patent 7978337 Interferometer utilizing polarization scanning

US Patent 7978340 System and method for determining positions of structures on a substrate

US Patent 7978342 Method and apparatus for measuring expansion of materials

US Patent 7982881 Apparatus and method for interferometric measurement of a sample

US Patent 7982882 Optical wave interference measuring apparatus

US Patent 7982883 On-chip phase microscope/beam profiler based on differential interference contrast and/or surface plasmon assisted interference

US Patent 7990539 Sensor and method utilizing multiple optical interferometers

US Patent 7990540 Apparatus and methods using highly optically dispersive media

US Patent 7990543 Surface characterization based on optical phase shifting interferometry

US Patent 7995212 Optical displacement measuring device

US Patent 7999948 Interferometric system for the use of special-purpose optical systems

US Patent 8000520 Apparatus and method for testing image sensor wafers to identify pixel defects

US Patent 8009294 Chemical sensing system and method

US Patent 8009295 Chemical sensing with noise pre-compensation