Is a
Patent attributes
Current Assignee
Patent Jurisdiction
Patent Number
Patent Inventor Names
David B. Kay0
Date of Patent
September 7, 2010
0Patent Application Number
119584110
Date Filed
December 18, 2007
0Patent Primary Examiner
Patent abstract
A partial coherence interferometer incorporates a focusing system for resolving measurement ambiguities. A focus-sensing beam is directed through a common objective with the measurement beam of the interferometer for conveying the beams to and from a test surface. An unambiguous measuring range is equated to a predetermined range of focusing errors.
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