List of Ebara Corporation patents

Patents where

Current Assignee

Name

Ebara Corporation

Name	Description	Patent Applicant	Current Assignee	Patent Jurisdiction	Patent Number	Date of Patent
‌ US Patent 6855929 Apparatus for inspection with electron beam, method for operating same, and method for manufacturing semiconductor device using former	Patent 6855929 was granted and assigned to Ebara Corporation on February, 2005 by the United States Patent and Trademark Office.		Ebara Corporation	United States Patent and Trademark Office	6855929	February 15, 2005
‌ US Patent 11478893 Polishing method and polishing apparatus		Ebara Corporation	Ebara Corporation	United States Patent and Trademark Office	11478893	October 25, 2022
‌ US Patent 7044838 Chemical mechanical polishing head assembly having floating wafer carrier and retaining ring	Patent 7044838 was granted and assigned to Ebara Corporation on May, 2006 by the United States Patent and Trademark Office.		Ebara Corporation	United States Patent and Trademark Office	7044838	May 16, 2006
‌ US Patent 11396876 Control device, control system, control method, recording medium and machine learning device	Patent 11396876 was granted and assigned to Ebara Corporation on July, 2022 by the United States Patent and Trademark Office.	Ebara Corporation	Ebara Corporation	United States Patent and Trademark Office	11396876	July 26, 2022
‌ US Patent 11465256 Apparatus for polishing and method for polishing		Ebara Corporation	Ebara Corporation	United States Patent and Trademark Office	11465256	October 11, 2022
‌ US Patent 6942548 Polishing method using an abrading plate	Patent 6942548 was granted and assigned to Ebara Corporation on September, 2005 by the United States Patent and Trademark Office.		Ebara Corporation	United States Patent and Trademark Office	6942548	September 13, 2005
‌ US Patent 11542625 Substrate holder	Patent 11542625 was granted and assigned to Ebara Corporation on January, 2023 by the United States Patent and Trademark Office.	Ebara Corporation	Ebara Corporation	United States Patent and Trademark Office	11542625	January 3, 2023
‌ US Patent 6852019 Substrate holding apparatus	Patent 6852019 was granted and assigned to Ebara Corporation on February, 2005 by the United States Patent and Trademark Office.		Ebara Corporation	United States Patent and Trademark Office	6852019	February 8, 2005
‌ US Patent 7083507 Substrate holding apparatus	Patent 7083507 was granted and assigned to Ebara Corporation on August, 2006 by the United States Patent and Trademark Office.		Ebara Corporation	United States Patent and Trademark Office	7083507	August 1, 2006
‌ US Patent 11461647 Method of constructing prediction model that predicts number of plateable substrates, method of constructing selection model for predicting component that causes failure, and method of predicting number of plateable substrates		Ebara Corporation	Ebara Corporation	United States Patent and Trademark Office	11461647	October 4, 2022
‌ US Patent 11315812 Semiconductor manufacturing apparatus, failure prediction method for semiconductor manufacturing apparatus, and failure prediction program for semiconductor manufacturing apparatus	Patent 11315812 was granted and assigned to Ebara Corporation on April, 2022 by the United States Patent and Trademark Office.	Ebara Corporation	Ebara Corporation	United States Patent and Trademark Office	11315812	April 26, 2022
‌ US Patent 11511386 Polishing apparatus and polishing method	Patent 11511386 was granted and assigned to Ebara Corporation on November, 2022 by the United States Patent and Trademark Office.	Ebara Corporation	Ebara Corporation	United States Patent and Trademark Office	11511386	November 29, 2022
‌ US Patent 11380561 Cleaning device, substrate processing apparatus, maintenance method of cleaning device, and computer-readable recording medium including maintenance program of cleaning device	Patent 11380561 was granted and assigned to Ebara Corporation on July, 2022 by the United States Patent and Trademark Office.	Ebara Corporation	Ebara Corporation	United States Patent and Trademark Office	11380561	July 5, 2022
‌ US Patent 7033260 Substrate holding device and polishing device	Patent 7033260 was granted and assigned to Ebara Corporation on April, 2006 by the United States Patent and Trademark Office.		Ebara Corporation	United States Patent and Trademark Office	7033260	April 25, 2006
‌ US Patent 6969562 Fuel cell power generation method and system	Patent 6969562 was granted and assigned to Ebara Corporation on November, 2005 by the United States Patent and Trademark Office.		Ebara Corporation	United States Patent and Trademark Office	6969562	November 29, 2005
‌ US Patent 11376704 Method of identifying trajectory of eddy current sensor, method of calculating substrate polishing progress, method of stopping operation of substrate polishing apparatus, method of regularizing substrate polishing progress, program for executing the same, and non-transitory recording medium that records program	Patent 11376704 was granted and assigned to Ebara Corporation on July, 2022 by the United States Patent and Trademark Office.	Ebara Corporation	Ebara Corporation	United States Patent and Trademark Office	11376704	July 5, 2022
‌ US Patent 6926585 Pressure control system and polishing apparatus	Patent 6926585 was granted and assigned to Ebara Corporation on August, 2005 by the United States Patent and Trademark Office.		Ebara Corporation	United States Patent and Trademark Office	6926585	August 9, 2005
‌ US Patent 11007621 Polishing apparatus and polishing method	Patent 11007621 was granted and assigned to Ebara Corporation on May, 2021 by the United States Patent and Trademark Office.	Ebara Corporation	Ebara Corporation	United States Patent and Trademark Office	11007621	May 18, 2021
‌ US Patent 6979914 Power generating apparatus	Patent 6979914 was granted and assigned to Ebara Corporation on December, 2005 by the United States Patent and Trademark Office.		Ebara Corporation	United States Patent and Trademark Office	6979914	December 27, 2005
‌ US Patent 6992290 Electron beam inspection system and inspection method and method of manufacturing devices using the system	Patent 6992290 was granted and assigned to Ebara Corporation on January, 2006 by the United States Patent and Trademark Office.		Ebara Corporation	United States Patent and Trademark Office	6992290	January 31, 2006
‌ US Patent 12068189 Elastic membrane, substrate holding device, and polishing apparatus	Patent 12068189 was granted and assigned to Ebara Corporation on August, 2024 by the United States Patent and Trademark Office.	Ebara Corporation	Ebara Corporation	United States Patent and Trademark Office	12068189	August 20, 2024
‌ US Patent 11527422 Exhaust gas processing apparatus	Patent 11527422 was granted and assigned to Ebara Corporation on December, 2022 by the United States Patent and Trademark Office.	Ebara Corporation	Ebara Corporation	United States Patent and Trademark Office	11527422	December 13, 2022
‌ US Patent 11618123 Polishing method and polishing apparatus	Patent 11618123 was granted and assigned to Ebara Corporation on April, 2023 by the United States Patent and Trademark Office.	Ebara Corporation	Ebara Corporation	United States Patent and Trademark Office	11618123	April 4, 2023
‌ US Patent 11346896 Electromagnet control device and electromagnet system	Patent 11346896 was granted and assigned to Ebara Corporation on May, 2022 by the United States Patent and Trademark Office.	Ebara Corporation	Ebara Corporation	United States Patent and Trademark Office	11346896	May 31, 2022
‌ US Patent 11433502 Polishing table and polishing apparatus having ihe same	Patent 11433502 was granted and assigned to Ebara Corporation on September, 2022 by the United States Patent and Trademark Office.	Ebara Corporation	Ebara Corporation	United States Patent and Trademark Office	11433502	September 6, 2022

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