Is a
Patent attributes
Patent Jurisdiction
Patent Number
Patent Inventor Names
Hongyong Zhang0
Date of Patent
September 14, 2010
0Patent Application Number
098604990
Date Filed
May 21, 2001
0Patent Primary Examiner
Patent abstract
Method of processing, e.g., laser annealing, objects such as semiconductor devices with pulsed lasers with high production yield and high reproducibility so as to obtain good characteristics stably. The pulse width of the irradiated pulse beam is set to more than 30 nsec to stabilize the processing. To achieve a pulse width exceeding 30 nsec, plural lasers are connected in series or in parallel and excited successively.
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