US Patent D989144 Apparatus for evaluating semiconductor substrate
Patent D989144 was granted and assigned to Hitachi on June, 2023 by the United States Patent and Trademark Office.
Is a
Current Assignee
Date Filed
October 13, 2021
0
Date of Patent
June 13, 2023
0
Patent Applicant
Patent Application Number
29789674
0
Patent Citations Received
Patent Jurisdiction
Patent Number
Patent Primary Examiner
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