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US Patent D989012 Elastic membrane

OverviewStructured DataIssuesContributorsActivity
Is a
Patent
Patent
0
Current Assignee
Ebara Corporation
Ebara Corporation
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Date Filed
March 16, 2021
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Date of Patent
June 13, 2023
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Patent Applicant
Ebara Corporation
Ebara Corporation
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Patent Application Number
29774336
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Patent Citations
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US Patent D830981 Susceptor for semiconductor substrate processing apparatus
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US Patent D832023 Circular grill pan
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US Patent D839224 Elastic membrane for semiconductor wafer polishing
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US Patent D862404 Sealing material ring for a semiconductor manufacturing apparatus
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US Patent D908645 Sputtering target for a physical vapor deposition chamber
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US Patent D920936 Higher temperature vented susceptor
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US Patent D931240 Substrate support pedestal
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US Patent D933726 Deposition ring for a semiconductor processing chamber
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US Patent D940765 Target profile for a physical vapor deposition chamber target
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US Patent D944946 Shower plate
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•••
Patent Jurisdiction
United States Patent and Trademark Office
United States Patent and Trademark Office
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Patent Number
D989012
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Patent Primary Examiner
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Barbara Fox
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CPC Code
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H01R 24/00
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H01R 12/00
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H01R 12/70
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H01R 13/62
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