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US Patent D920936 Higher temperature vented susceptor
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Is a
Patent
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Date Filed
January 17, 2019
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Date of Patent
June 1, 2021
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Patent Application Number
29677173
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Patent Citations Received
US Patent D1021832 Elastic membrane
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US Patent D989012 Elastic membrane
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US Patent 11764101 Susceptor for semiconductor substrate processing
US Patent D1006768 Semiconductor wafer for mosaic solar cell fabrication
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Patent Inventor Names
Sam Kim
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Dakai Bian
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Saket Rathi
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Uday Kiran Rokkam
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Patent Jurisdiction
United States Patent and Trademark Office
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Patent Number
D920936
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Patent Primary Examiner
Elizabeth J Oswecki
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