US Patent D893438 Wafer boat
Patent D893438 was granted and assigned to Tokyo Electron on August, 2020 by the United States Patent and Trademark Office.
Is a
Current Assignee
Date Filed
February 2, 2018
0
Date of Patent
August 18, 2020
0
Patent Applicant
Patent Application Number
29635787
0
Patent Jurisdiction
Patent Number
Patent Primary Examiner
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