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US Patent D853979 Reaction tube

OverviewStructured DataIssuesContributorsActivity
Is a
Patent
Patent
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Date Filed
May 30, 2018
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Date of Patent
July 16, 2019
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Patent Applicant
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Hitachi Kokusai Electric Inc.
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Patent Application Number
29649496
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Patent Citations Received
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US Patent D1019582 Inner tube of reaction tube for semiconductor manufacturing equipment
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US Patent D986826 Reaction tube
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US Patent D1019583 Inner tube of reaction tube for semiconductor manufacturing equipment
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US Patent D1019581 Inner tube of reaction tube for semiconductor manufacturing equipment
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Patent Inventor Names
Yusaku Okajima
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Shinya Ebata
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Toru Kagaya
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Hiroaki Hiramatsu
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Patent Jurisdiction
United States Patent and Trademark Office
United States Patent and Trademark Office
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Patent Number
D853979
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Patent Primary Examiner
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Elizabeth J Oswecki
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