US Patent D804436 Upper chamber for a plasma processing apparatus
Patent D804436 was granted and assigned to Hitachi on December, 2017 by the United States Patent and Trademark Office.
Is a
Current Assignee
Date Filed
October 30, 2015
Date of Patent
December 5, 2017
Patent Applicant
Patent Application Number
29544068
Patent Citations Received
Patent Inventor Names
Susumu Tauchi
0
Kohei Sato
0
Takashi Uemura
0
Patent Jurisdiction
Patent Number
Patent Primary Examiner
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