US Patent D791721 Wafer boat

Patent D791721 was granted and assigned to Tokyo Electron on July, 2017 by the United States Patent and Trademark Office.

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Is a

Patent

Patent attributes

Patent Applicant

Tokyo Electron

Current Assignee

Tokyo Electron

Patent Jurisdiction

United States Patent and Trademark Office

Patent Number

D7917210

Patent Inventor Names

Masami Oikawa0

Yoshinori Kusakabe0

Date of Patent

July 11, 2017

Patent Application Number

295255630

Date Filed

April 30, 2015

Patent Citations Received

‌

US Patent D1022933 Wafer support of semiconductor manufacturing apparatus

Patent Primary Examiner

‌

Elizabeth J Oswecki

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