US Patent D788038 Heat insulating unit for substrate processing apparatus
Patent D788038 was granted and assigned to Hitachi Kokusai Electric Inc. on May, 2017 by the United States Patent and Trademark Office.
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Patent Citations Received
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Patent Inventor Names
Daisuke Hara0
Hideto Tateno0
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Official Website
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US Patent D0788038 Heat insulating unit for substrate processing apparatus US Patent D788038 Heat insulating unit for substrate processing apparatus
Infobox
Patent Number
D07880380
Patent Number
D7880380
Edits on 27 Mar, 2023
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Infobox
Is a
Patent Applicant
Current Assignee
Patent Jurisdiction
Patent Number
D07880380
Date of Patent
May 30, 2017
0Patent Application Number
295550420
Date Filed
February 18, 2016
0Official Website
Patent Primary Examiner
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Website URL
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US Patent D0788038 Heat insulating unit for substrate processing apparatus
Infobox
Is a
Patent applicant
Current assignee
Patent jurisdiction
Patent number
D0788038
Date of patent
May 30, 2017
Patent application number
29555042
Date Filed
February 18, 2016
Patent primary examiner
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