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US Patent D678745 Spinning insert polishing pad

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Patent
Patent
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Patent Jurisdiction
United States Patent and Trademark Office
United States Patent and Trademark Office
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Patent Number
D6787450
Patent Inventor Names
Phuong Van Nguyen0
Date of Patent
March 26, 2013
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Patent Application Number
293968340
Date Filed
July 7, 2011
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Patent Citations Received
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US Patent D1021595 Polishing pad
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US Patent D1000928 Polishing pad
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US Patent D1001749 Base plate for a foot pedal
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US Patent D1007449 Target profile for a physical vapor deposition chamber target
0
Patent Primary Examiner
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Philip S Hyder
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