US Patent D570309 Wafer boat
Patent D570309 was granted and assigned to Tokyo Electron on June, 2008 by the United States Patent and Trademark Office.
Is a
Current Assignee
Date Filed
April 24, 2007
Date of Patent
June 3, 2008
Patent Application Number
29274445
Patent Citations Received
Patent Inventor Names
Hirofumi Kaneko
0
Izumi Sato
0
Patent Jurisdiction
Patent Number
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