US Patent D556157 Load-lock chamber
Patent D556157 was granted and assigned to Tokyo Electron on November, 2007 by the United States Patent and Trademark Office.
Is a
Current Assignee
Date Filed
November 22, 2004
Date of Patent
November 27, 2007
Patent Application Number
29217730
Patent Inventor Names
Hiroki Oka
0
Keisuke Kondoh
0
Makoto Tashiro
0
Patent Jurisdiction
Patent Number
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